W̴̜̹̜͒̽ę̷̞̲̳̑̅͊̊̉ ̸̨̛͖̯̲̳̝͛͌ẘ̴͙̫̹̮̈́̑̕ȃ̷̼̹͈͔̘̊́͆ń̸͙̼̖̲̣̻̿͑͝t̷̨̪͍̳̮̟͂́ ̴̡̖̋̚t̴̛̻̆̔̕͝͠ǫ̷̧͍̘̲͖͂͑͌̌̃̾ ...
Abstract: Mask optimization is a vital step in the VLSI manufacturing process in advanced technology nodes. As one of the most representative techniques, optical proximity correction (OPC) is widely ...