MEMS-based accelerometers are increasingly deployed in harsh environments where mechanical stress is not just expected but constant.
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Abstract: High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic ...
Abstract: We demonstrate a fiber-optic micro-electron-mechanical systems (MEMS) accelerometer based on a symmetric push-pull spring structure made by micromachining on a silicon substrate, which ...